9/5/2012	10:09:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	10:09:53 AM	Recipe started at 10:09 AM
9/5/2012	10:09:53 AM	Helium valve closed
9/5/2012	10:09:53 AM	H2 valve closed
9/5/2012	10:09:53 AM	BCl3 valve closed
9/5/2012	10:09:53 AM	PH3 valve closed
9/5/2012	10:09:53 AM	SiCl4 pre valve closed
9/5/2012	10:09:53 AM	SiCl4 post valve closed
9/5/2012	10:09:53 AM	Main Vac valve closed
9/5/2012	10:09:53 AM	Bypass valve closed
9/5/2012	10:09:53 AM	Bubbler valve closed
9/5/2012	10:09:53 AM	Helium MFC set to  0.000000
9/5/2012	10:09:53 AM	H2 MFC set to  0.000000
9/5/2012	10:09:53 AM	BCl3 MFC set to  0.000000
9/5/2012	10:09:53 AM	PH3 MFC set to  0.000000
9/5/2012	10:09:53 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:09:53 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:09:53 AM	Tube furnace set to 0
9/5/2012	10:09:56 AM	H2 valve closed
9/5/2012	10:09:56 AM	BCl3 valve closed
9/5/2012	10:09:56 AM	PH3 valve closed
9/5/2012	10:09:56 AM	SiCl4 pre valve closed
9/5/2012	10:09:56 AM	SiCl4 post valve closed
9/5/2012	10:09:56 AM	Main Vac valve closed
9/5/2012	10:09:56 AM	Bypass valve closed
9/5/2012	10:09:56 AM	Bubbler valve closed
9/5/2012	10:09:56 AM	Helium valve opened
9/5/2012	10:09:56 AM	Helium MFC set to  500.000000
9/5/2012	10:09:56 AM	H2 MFC set to  0.000000
9/5/2012	10:09:56 AM	BCl3 MFC set to  0.000000
9/5/2012	10:09:56 AM	PH3 MFC set to  0.000000
9/5/2012	10:09:56 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:09:56 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:09:56 AM	Tube furnace set to 0
9/5/2012	10:11:09 AM	Helium valve closed
9/5/2012	10:11:09 AM	H2 valve closed
9/5/2012	10:11:09 AM	BCl3 valve closed
9/5/2012	10:11:09 AM	PH3 valve closed
9/5/2012	10:11:09 AM	SiCl4 pre valve closed
9/5/2012	10:11:09 AM	SiCl4 post valve closed
9/5/2012	10:11:09 AM	Main Vac valve closed
9/5/2012	10:11:09 AM	Bypass valve closed
9/5/2012	10:11:09 AM	Bubbler valve closed
9/5/2012	10:11:09 AM	Helium MFC set to  0.000000
9/5/2012	10:11:09 AM	H2 MFC set to  0.000000
9/5/2012	10:11:09 AM	BCl3 MFC set to  0.000000
9/5/2012	10:11:09 AM	PH3 MFC set to  0.000000
9/5/2012	10:11:09 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:11:09 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:11:09 AM	Tube furnace set to 0
9/5/2012	10:11:10 AM	Run finished at 10:11 AM
9/5/2012	10:11:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	10:12:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	10:12:49 AM	Recipe started at 10:12 AM
9/5/2012	10:12:49 AM	Helium valve closed
9/5/2012	10:12:49 AM	H2 valve closed
9/5/2012	10:12:49 AM	BCl3 valve closed
9/5/2012	10:12:49 AM	PH3 valve closed
9/5/2012	10:12:49 AM	SiCl4 pre valve closed
9/5/2012	10:12:49 AM	SiCl4 post valve closed
9/5/2012	10:12:49 AM	Main Vac valve closed
9/5/2012	10:12:49 AM	Bubbler valve closed
9/5/2012	10:12:49 AM	Bypass valve opened
9/5/2012	10:12:49 AM	Helium MFC set to  0.000000
9/5/2012	10:12:49 AM	H2 MFC set to  0.000000
9/5/2012	10:12:49 AM	BCl3 MFC set to  0.000000
9/5/2012	10:12:49 AM	PH3 MFC set to  0.000000
9/5/2012	10:12:49 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:12:49 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:12:50 AM	Tube furnace set to 0
9/5/2012	10:14:02 AM	Helium valve closed
9/5/2012	10:14:02 AM	H2 valve closed
9/5/2012	10:14:02 AM	BCl3 valve closed
9/5/2012	10:14:02 AM	PH3 valve closed
9/5/2012	10:14:02 AM	SiCl4 pre valve closed
9/5/2012	10:14:02 AM	SiCl4 post valve closed
9/5/2012	10:14:02 AM	Main Vac valve closed
9/5/2012	10:14:02 AM	Bubbler valve closed
9/5/2012	10:14:02 AM	Bypass valve opened
9/5/2012	10:14:02 AM	Helium MFC set to  0.000000
9/5/2012	10:14:02 AM	H2 MFC set to  0.000000
9/5/2012	10:14:02 AM	BCl3 MFC set to  0.000000
9/5/2012	10:14:02 AM	PH3 MFC set to  0.000000
9/5/2012	10:14:02 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:14:02 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:14:02 AM	Tube furnace set to 0
9/5/2012	10:15:02 AM	Helium valve closed
9/5/2012	10:15:02 AM	H2 valve closed
9/5/2012	10:15:02 AM	BCl3 valve closed
9/5/2012	10:15:02 AM	PH3 valve closed
9/5/2012	10:15:02 AM	SiCl4 pre valve closed
9/5/2012	10:15:02 AM	SiCl4 post valve closed
9/5/2012	10:15:02 AM	Bypass valve closed
9/5/2012	10:15:02 AM	Bubbler valve closed
9/5/2012	10:15:02 AM	Main Vac valve opened
9/5/2012	10:15:02 AM	Helium MFC set to  0.000000
9/5/2012	10:15:02 AM	H2 MFC set to  0.000000
9/5/2012	10:15:02 AM	BCl3 MFC set to  0.000000
9/5/2012	10:15:02 AM	PH3 MFC set to  0.000000
9/5/2012	10:15:02 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:15:02 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:15:02 AM	Tube furnace set to 0
9/5/2012	10:15:03 AM	Run finished at 10:15 AM
9/5/2012	10:15:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	10:16:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	10:16:30 AM	Recipe started at 10:16 AM
9/5/2012	10:16:30 AM	Helium valve closed
9/5/2012	10:16:30 AM	H2 valve closed
9/5/2012	10:16:30 AM	BCl3 valve closed
9/5/2012	10:16:30 AM	PH3 valve closed
9/5/2012	10:16:30 AM	SiCl4 pre valve closed
9/5/2012	10:16:30 AM	SiCl4 post valve closed
9/5/2012	10:16:30 AM	Main Vac valve closed
9/5/2012	10:16:30 AM	Bypass valve closed
9/5/2012	10:16:30 AM	Bubbler valve closed
9/5/2012	10:16:30 AM	Helium MFC set to  0.000000
9/5/2012	10:16:30 AM	H2 MFC set to  0.000000
9/5/2012	10:16:30 AM	BCl3 MFC set to  0.000000
9/5/2012	10:16:30 AM	PH3 MFC set to  0.000000
9/5/2012	10:16:30 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:16:30 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:16:30 AM	Tube furnace set to 0
9/5/2012	10:16:33 AM	H2 valve closed
9/5/2012	10:16:33 AM	BCl3 valve closed
9/5/2012	10:16:33 AM	PH3 valve closed
9/5/2012	10:16:33 AM	SiCl4 pre valve closed
9/5/2012	10:16:33 AM	SiCl4 post valve closed
9/5/2012	10:16:33 AM	Main Vac valve closed
9/5/2012	10:16:33 AM	Bypass valve closed
9/5/2012	10:16:33 AM	Bubbler valve closed
9/5/2012	10:16:33 AM	Helium valve opened
9/5/2012	10:16:34 AM	Helium MFC set to  500.000000
9/5/2012	10:16:34 AM	H2 MFC set to  0.000000
9/5/2012	10:16:34 AM	BCl3 MFC set to  0.000000
9/5/2012	10:16:34 AM	PH3 MFC set to  0.000000
9/5/2012	10:16:34 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:16:34 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:16:34 AM	Tube furnace set to 0
9/5/2012	10:17:47 AM	Helium valve closed
9/5/2012	10:17:47 AM	H2 valve closed
9/5/2012	10:17:47 AM	BCl3 valve closed
9/5/2012	10:17:47 AM	PH3 valve closed
9/5/2012	10:17:47 AM	SiCl4 pre valve closed
9/5/2012	10:17:47 AM	SiCl4 post valve closed
9/5/2012	10:17:47 AM	Main Vac valve closed
9/5/2012	10:17:47 AM	Bypass valve closed
9/5/2012	10:17:47 AM	Bubbler valve closed
9/5/2012	10:17:47 AM	Helium MFC set to  0.000000
9/5/2012	10:17:47 AM	H2 MFC set to  0.000000
9/5/2012	10:17:47 AM	BCl3 MFC set to  0.000000
9/5/2012	10:17:48 AM	PH3 MFC set to  0.000000
9/5/2012	10:17:48 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:17:48 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:17:48 AM	Tube furnace set to 0
9/5/2012	10:17:49 AM	Run finished at 10:17 AM
9/5/2012	10:17:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	10:19:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	10:19:53 AM	Recipe started at 10:19 AM
9/5/2012	10:19:53 AM	Helium valve closed
9/5/2012	10:19:53 AM	H2 valve closed
9/5/2012	10:19:53 AM	BCl3 valve closed
9/5/2012	10:19:53 AM	PH3 valve closed
9/5/2012	10:19:53 AM	SiCl4 pre valve closed
9/5/2012	10:19:53 AM	SiCl4 post valve closed
9/5/2012	10:19:53 AM	Main Vac valve closed
9/5/2012	10:19:53 AM	Bubbler valve closed
9/5/2012	10:19:53 AM	Bypass valve opened
9/5/2012	10:19:53 AM	Helium MFC set to  0.000000
9/5/2012	10:19:53 AM	H2 MFC set to  0.000000
9/5/2012	10:19:53 AM	BCl3 MFC set to  0.000000
9/5/2012	10:19:53 AM	PH3 MFC set to  0.000000
9/5/2012	10:19:53 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:19:53 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:19:53 AM	Tube furnace set to 0
9/5/2012	10:21:06 AM	Helium valve closed
9/5/2012	10:21:06 AM	H2 valve closed
9/5/2012	10:21:06 AM	BCl3 valve closed
9/5/2012	10:21:06 AM	PH3 valve closed
9/5/2012	10:21:06 AM	SiCl4 pre valve closed
9/5/2012	10:21:06 AM	SiCl4 post valve closed
9/5/2012	10:21:06 AM	Main Vac valve closed
9/5/2012	10:21:06 AM	Bubbler valve closed
9/5/2012	10:21:06 AM	Bypass valve opened
9/5/2012	10:21:06 AM	Helium MFC set to  0.000000
9/5/2012	10:21:06 AM	H2 MFC set to  0.000000
9/5/2012	10:21:06 AM	BCl3 MFC set to  0.000000
9/5/2012	10:21:06 AM	PH3 MFC set to  0.000000
9/5/2012	10:21:06 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:21:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:21:06 AM	Tube furnace set to 0
9/5/2012	10:22:06 AM	Helium valve closed
9/5/2012	10:22:06 AM	H2 valve closed
9/5/2012	10:22:06 AM	BCl3 valve closed
9/5/2012	10:22:06 AM	PH3 valve closed
9/5/2012	10:22:06 AM	SiCl4 pre valve closed
9/5/2012	10:22:06 AM	SiCl4 post valve closed
9/5/2012	10:22:06 AM	Bypass valve closed
9/5/2012	10:22:06 AM	Bubbler valve closed
9/5/2012	10:22:06 AM	Main Vac valve opened
9/5/2012	10:22:06 AM	Helium MFC set to  0.000000
9/5/2012	10:22:06 AM	H2 MFC set to  0.000000
9/5/2012	10:22:06 AM	BCl3 MFC set to  0.000000
9/5/2012	10:22:06 AM	PH3 MFC set to  0.000000
9/5/2012	10:22:06 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:22:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:22:06 AM	Tube furnace set to 0
9/5/2012	10:22:07 AM	Run finished at 10:22 AM
9/5/2012	10:22:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	10:47:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/5/2012	10:47:22 AM	Recipe started at 10:47 AM
9/5/2012	10:47:22 AM	Helium valve closed
9/5/2012	10:47:22 AM	H2 valve closed
9/5/2012	10:47:22 AM	BCl3 valve closed
9/5/2012	10:47:22 AM	PH3 valve closed
9/5/2012	10:47:22 AM	SiCl4 pre valve closed
9/5/2012	10:47:22 AM	SiCl4 post valve closed
9/5/2012	10:47:22 AM	Main Vac valve closed
9/5/2012	10:47:22 AM	Bubbler valve closed
9/5/2012	10:47:22 AM	Bypass valve opened
9/5/2012	10:47:22 AM	Helium MFC set to  0.000000
9/5/2012	10:47:22 AM	H2 MFC set to  0.000000
9/5/2012	10:47:22 AM	BCl3 MFC set to  0.000000
9/5/2012	10:47:22 AM	PH3 MFC set to  0.000000
9/5/2012	10:47:22 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:47:22 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:47:22 AM	Tube furnace set to 0
9/5/2012	10:47:22 AM	Helium valve closed
9/5/2012	10:47:22 AM	H2 valve closed
9/5/2012	10:47:22 AM	BCl3 valve closed
9/5/2012	10:47:22 AM	PH3 valve closed
9/5/2012	10:47:22 AM	SiCl4 pre valve closed
9/5/2012	10:47:22 AM	SiCl4 post valve closed
9/5/2012	10:47:23 AM	Main Vac valve closed
9/5/2012	10:47:23 AM	Bubbler valve closed
9/5/2012	10:47:23 AM	Bypass valve opened
9/5/2012	10:47:23 AM	Helium MFC set to  0.000000
9/5/2012	10:47:23 AM	H2 MFC set to  0.000000
9/5/2012	10:47:23 AM	BCl3 MFC set to  0.000000
9/5/2012	10:47:23 AM	PH3 MFC set to  0.000000
9/5/2012	10:47:23 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:47:23 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:47:23 AM	Tube furnace set to 0
9/5/2012	10:47:24 AM	Helium valve closed
9/5/2012	10:47:24 AM	H2 valve closed
9/5/2012	10:47:24 AM	BCl3 valve closed
9/5/2012	10:47:24 AM	PH3 valve closed
9/5/2012	10:47:24 AM	SiCl4 pre valve closed
9/5/2012	10:47:24 AM	SiCl4 post valve closed
9/5/2012	10:47:24 AM	Bypass valve closed
9/5/2012	10:47:24 AM	Bubbler valve closed
9/5/2012	10:47:24 AM	Main Vac valve opened
9/5/2012	10:47:24 AM	Helium MFC set to  0.000000
9/5/2012	10:47:24 AM	H2 MFC set to  0.000000
9/5/2012	10:47:24 AM	BCl3 MFC set to  0.000000
9/5/2012	10:47:24 AM	PH3 MFC set to  0.000000
9/5/2012	10:47:24 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:47:24 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:47:24 AM	Tube furnace set to 0
9/5/2012	10:47:25 AM	H2 valve closed
9/5/2012	10:47:25 AM	BCl3 valve closed
9/5/2012	10:47:25 AM	PH3 valve closed
9/5/2012	10:47:25 AM	SiCl4 pre valve closed
9/5/2012	10:47:25 AM	SiCl4 post valve closed
9/5/2012	10:47:25 AM	Bypass valve closed
9/5/2012	10:47:25 AM	Bubbler valve closed
9/5/2012	10:47:25 AM	Helium valve opened
9/5/2012	10:47:25 AM	Main Vac valve opened
9/5/2012	10:47:25 AM	Helium MFC set to  20.000000
9/5/2012	10:47:25 AM	H2 MFC set to  0.000000
9/5/2012	10:47:25 AM	BCl3 MFC set to  0.000000
9/5/2012	10:47:25 AM	PH3 MFC set to  0.000000
9/5/2012	10:47:25 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:47:25 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:47:25 AM	Tube furnace set to 0
9/5/2012	10:47:55 AM	Helium valve closed
9/5/2012	10:47:55 AM	H2 valve closed
9/5/2012	10:47:55 AM	BCl3 valve closed
9/5/2012	10:47:55 AM	PH3 valve closed
9/5/2012	10:47:55 AM	SiCl4 pre valve closed
9/5/2012	10:47:55 AM	SiCl4 post valve closed
9/5/2012	10:47:55 AM	Bypass valve closed
9/5/2012	10:47:55 AM	Bubbler valve closed
9/5/2012	10:47:55 AM	Main Vac valve opened
9/5/2012	10:47:55 AM	Helium MFC set to  0.000000
9/5/2012	10:47:55 AM	H2 MFC set to  0.000000
9/5/2012	10:47:55 AM	BCl3 MFC set to  0.000000
9/5/2012	10:47:55 AM	PH3 MFC set to  0.000000
9/5/2012	10:47:55 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:47:55 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:47:55 AM	Tube furnace set to 0
9/5/2012	10:48:25 AM	H2 valve closed
9/5/2012	10:48:25 AM	BCl3 valve closed
9/5/2012	10:48:25 AM	PH3 valve closed
9/5/2012	10:48:25 AM	SiCl4 pre valve closed
9/5/2012	10:48:25 AM	SiCl4 post valve closed
9/5/2012	10:48:25 AM	Bypass valve closed
9/5/2012	10:48:25 AM	Bubbler valve closed
9/5/2012	10:48:25 AM	Helium valve opened
9/5/2012	10:48:25 AM	Main Vac valve opened
9/5/2012	10:48:25 AM	Helium MFC set to  20.000000
9/5/2012	10:48:25 AM	H2 MFC set to  0.000000
9/5/2012	10:48:25 AM	BCl3 MFC set to  0.000000
9/5/2012	10:48:25 AM	PH3 MFC set to  0.000000
9/5/2012	10:48:25 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:48:25 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:48:25 AM	Tube furnace set to 0
9/5/2012	10:48:55 AM	Helium valve closed
9/5/2012	10:48:55 AM	H2 valve closed
9/5/2012	10:48:55 AM	BCl3 valve closed
9/5/2012	10:48:55 AM	PH3 valve closed
9/5/2012	10:48:55 AM	SiCl4 pre valve closed
9/5/2012	10:48:55 AM	SiCl4 post valve closed
9/5/2012	10:48:55 AM	Bypass valve closed
9/5/2012	10:48:55 AM	Bubbler valve closed
9/5/2012	10:48:55 AM	Main Vac valve opened
9/5/2012	10:48:55 AM	Helium MFC set to  0.000000
9/5/2012	10:48:55 AM	H2 MFC set to  0.000000
9/5/2012	10:48:55 AM	BCl3 MFC set to  0.000000
9/5/2012	10:48:55 AM	PH3 MFC set to  0.000000
9/5/2012	10:48:55 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:48:55 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:48:56 AM	Tube furnace set to 0
9/5/2012	10:49:26 AM	H2 valve closed
9/5/2012	10:49:26 AM	BCl3 valve closed
9/5/2012	10:49:26 AM	PH3 valve closed
9/5/2012	10:49:26 AM	SiCl4 pre valve closed
9/5/2012	10:49:26 AM	SiCl4 post valve closed
9/5/2012	10:49:26 AM	Bypass valve closed
9/5/2012	10:49:26 AM	Bubbler valve closed
9/5/2012	10:49:26 AM	Helium valve opened
9/5/2012	10:49:26 AM	Main Vac valve opened
9/5/2012	10:49:26 AM	Helium MFC set to  20.000000
9/5/2012	10:49:26 AM	H2 MFC set to  0.000000
9/5/2012	10:49:26 AM	BCl3 MFC set to  0.000000
9/5/2012	10:49:26 AM	PH3 MFC set to  0.000000
9/5/2012	10:49:26 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:49:26 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:49:26 AM	Tube furnace set to 0
9/5/2012	10:49:56 AM	Helium valve closed
9/5/2012	10:49:56 AM	H2 valve closed
9/5/2012	10:49:56 AM	BCl3 valve closed
9/5/2012	10:49:56 AM	PH3 valve closed
9/5/2012	10:49:56 AM	SiCl4 pre valve closed
9/5/2012	10:49:56 AM	SiCl4 post valve closed
9/5/2012	10:49:56 AM	Bypass valve closed
9/5/2012	10:49:56 AM	Bubbler valve closed
9/5/2012	10:49:56 AM	Main Vac valve opened
9/5/2012	10:49:56 AM	Helium MFC set to  0.000000
9/5/2012	10:49:56 AM	H2 MFC set to  0.000000
9/5/2012	10:49:56 AM	BCl3 MFC set to  0.000000
9/5/2012	10:49:56 AM	PH3 MFC set to  0.000000
9/5/2012	10:49:56 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:49:56 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:49:56 AM	Tube furnace set to 0
9/5/2012	10:50:26 AM	H2 valve closed
9/5/2012	10:50:26 AM	BCl3 valve closed
9/5/2012	10:50:26 AM	PH3 valve closed
9/5/2012	10:50:26 AM	SiCl4 pre valve closed
9/5/2012	10:50:26 AM	SiCl4 post valve closed
9/5/2012	10:50:26 AM	Bypass valve closed
9/5/2012	10:50:26 AM	Bubbler valve closed
9/5/2012	10:50:26 AM	Helium valve opened
9/5/2012	10:50:26 AM	Main Vac valve opened
9/5/2012	10:50:26 AM	Helium MFC set to  20.000000
9/5/2012	10:50:26 AM	H2 MFC set to  0.000000
9/5/2012	10:50:26 AM	BCl3 MFC set to  0.000000
9/5/2012	10:50:26 AM	PH3 MFC set to  0.000000
9/5/2012	10:50:26 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:50:26 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:50:26 AM	Tube furnace set to 0
9/5/2012	10:50:56 AM	Helium valve closed
9/5/2012	10:50:56 AM	H2 valve closed
9/5/2012	10:50:56 AM	BCl3 valve closed
9/5/2012	10:50:56 AM	PH3 valve closed
9/5/2012	10:50:56 AM	SiCl4 pre valve closed
9/5/2012	10:50:56 AM	SiCl4 post valve closed
9/5/2012	10:50:56 AM	Bypass valve closed
9/5/2012	10:50:56 AM	Bubbler valve closed
9/5/2012	10:50:56 AM	Main Vac valve opened
9/5/2012	10:50:56 AM	Helium MFC set to  0.000000
9/5/2012	10:50:56 AM	H2 MFC set to  0.000000
9/5/2012	10:50:56 AM	BCl3 MFC set to  0.000000
9/5/2012	10:50:56 AM	PH3 MFC set to  0.000000
9/5/2012	10:50:56 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:50:56 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:50:57 AM	Tube furnace set to 0
9/5/2012	10:51:27 AM	H2 valve closed
9/5/2012	10:51:27 AM	BCl3 valve closed
9/5/2012	10:51:27 AM	PH3 valve closed
9/5/2012	10:51:27 AM	SiCl4 pre valve closed
9/5/2012	10:51:27 AM	SiCl4 post valve closed
9/5/2012	10:51:27 AM	Bypass valve closed
9/5/2012	10:51:27 AM	Bubbler valve closed
9/5/2012	10:51:27 AM	Helium valve opened
9/5/2012	10:51:27 AM	Main Vac valve opened
9/5/2012	10:51:27 AM	Helium MFC set to  20.000000
9/5/2012	10:51:27 AM	H2 MFC set to  0.000000
9/5/2012	10:51:27 AM	BCl3 MFC set to  0.000000
9/5/2012	10:51:27 AM	PH3 MFC set to  0.000000
9/5/2012	10:51:27 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:51:27 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:51:27 AM	Tube furnace set to 0
9/5/2012	10:51:57 AM	Helium valve closed
9/5/2012	10:51:57 AM	H2 valve closed
9/5/2012	10:51:57 AM	BCl3 valve closed
9/5/2012	10:51:57 AM	PH3 valve closed
9/5/2012	10:51:57 AM	SiCl4 pre valve closed
9/5/2012	10:51:57 AM	SiCl4 post valve closed
9/5/2012	10:51:57 AM	Bypass valve closed
9/5/2012	10:51:57 AM	Bubbler valve closed
9/5/2012	10:51:57 AM	Main Vac valve opened
9/5/2012	10:51:57 AM	Helium MFC set to  0.000000
9/5/2012	10:51:57 AM	H2 MFC set to  0.000000
9/5/2012	10:51:57 AM	BCl3 MFC set to  0.000000
9/5/2012	10:51:57 AM	PH3 MFC set to  0.000000
9/5/2012	10:51:57 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:51:57 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:51:57 AM	Tube furnace set to 0
9/5/2012	10:52:27 AM	H2 valve closed
9/5/2012	10:52:27 AM	BCl3 valve closed
9/5/2012	10:52:27 AM	PH3 valve closed
9/5/2012	10:52:27 AM	SiCl4 pre valve closed
9/5/2012	10:52:27 AM	SiCl4 post valve closed
9/5/2012	10:52:27 AM	Bypass valve closed
9/5/2012	10:52:27 AM	Bubbler valve closed
9/5/2012	10:52:27 AM	Helium valve opened
9/5/2012	10:52:27 AM	Main Vac valve opened
9/5/2012	10:52:27 AM	Helium MFC set to  20.000000
9/5/2012	10:52:27 AM	H2 MFC set to  0.000000
9/5/2012	10:52:27 AM	BCl3 MFC set to  0.000000
9/5/2012	10:52:27 AM	PH3 MFC set to  0.000000
9/5/2012	10:52:27 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:52:27 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:52:27 AM	Tube furnace set to 0
9/5/2012	10:52:57 AM	Helium valve closed
9/5/2012	10:52:57 AM	H2 valve closed
9/5/2012	10:52:57 AM	BCl3 valve closed
9/5/2012	10:52:57 AM	PH3 valve closed
9/5/2012	10:52:57 AM	SiCl4 pre valve closed
9/5/2012	10:52:57 AM	SiCl4 post valve closed
9/5/2012	10:52:57 AM	Bypass valve closed
9/5/2012	10:52:57 AM	Bubbler valve closed
9/5/2012	10:52:57 AM	Main Vac valve opened
9/5/2012	10:52:57 AM	Helium MFC set to  0.000000
9/5/2012	10:52:57 AM	H2 MFC set to  0.000000
9/5/2012	10:52:57 AM	BCl3 MFC set to  0.000000
9/5/2012	10:52:57 AM	PH3 MFC set to  0.000000
9/5/2012	10:52:57 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:52:57 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:52:57 AM	Tube furnace set to 0
9/5/2012	10:53:28 AM	H2 valve closed
9/5/2012	10:53:28 AM	BCl3 valve closed
9/5/2012	10:53:28 AM	PH3 valve closed
9/5/2012	10:53:28 AM	SiCl4 pre valve closed
9/5/2012	10:53:28 AM	SiCl4 post valve closed
9/5/2012	10:53:28 AM	Bypass valve closed
9/5/2012	10:53:28 AM	Bubbler valve closed
9/5/2012	10:53:28 AM	Helium valve opened
9/5/2012	10:53:28 AM	Main Vac valve opened
9/5/2012	10:53:28 AM	Helium MFC set to  20.000000
9/5/2012	10:53:28 AM	H2 MFC set to  0.000000
9/5/2012	10:53:28 AM	BCl3 MFC set to  0.000000
9/5/2012	10:53:28 AM	PH3 MFC set to  0.000000
9/5/2012	10:53:28 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:53:28 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:53:28 AM	Tube furnace set to 0
9/5/2012	10:53:58 AM	Helium valve closed
9/5/2012	10:53:58 AM	H2 valve closed
9/5/2012	10:53:58 AM	BCl3 valve closed
9/5/2012	10:53:58 AM	PH3 valve closed
9/5/2012	10:53:58 AM	SiCl4 pre valve closed
9/5/2012	10:53:58 AM	SiCl4 post valve closed
9/5/2012	10:53:58 AM	Bypass valve closed
9/5/2012	10:53:58 AM	Bubbler valve closed
9/5/2012	10:53:58 AM	Main Vac valve opened
9/5/2012	10:53:58 AM	Helium MFC set to  0.000000
9/5/2012	10:53:58 AM	H2 MFC set to  0.000000
9/5/2012	10:53:58 AM	BCl3 MFC set to  0.000000
9/5/2012	10:53:58 AM	PH3 MFC set to  0.000000
9/5/2012	10:53:58 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:53:58 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:53:58 AM	Tube furnace set to 0
9/5/2012	10:54:28 AM	H2 valve closed
9/5/2012	10:54:28 AM	BCl3 valve closed
9/5/2012	10:54:28 AM	PH3 valve closed
9/5/2012	10:54:28 AM	SiCl4 pre valve closed
9/5/2012	10:54:28 AM	SiCl4 post valve closed
9/5/2012	10:54:28 AM	Bypass valve closed
9/5/2012	10:54:28 AM	Bubbler valve closed
9/5/2012	10:54:28 AM	Helium valve opened
9/5/2012	10:54:28 AM	Main Vac valve opened
9/5/2012	10:54:28 AM	Helium MFC set to  20.000000
9/5/2012	10:54:28 AM	H2 MFC set to  0.000000
9/5/2012	10:54:28 AM	BCl3 MFC set to  0.000000
9/5/2012	10:54:28 AM	PH3 MFC set to  0.000000
9/5/2012	10:54:28 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:54:28 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:54:28 AM	Tube furnace set to 0
9/5/2012	10:54:58 AM	Helium valve closed
9/5/2012	10:54:58 AM	H2 valve closed
9/5/2012	10:54:58 AM	BCl3 valve closed
9/5/2012	10:54:58 AM	PH3 valve closed
9/5/2012	10:54:58 AM	SiCl4 pre valve closed
9/5/2012	10:54:58 AM	SiCl4 post valve closed
9/5/2012	10:54:58 AM	Bypass valve closed
9/5/2012	10:54:58 AM	Bubbler valve closed
9/5/2012	10:54:58 AM	Main Vac valve opened
9/5/2012	10:54:58 AM	Helium MFC set to  0.000000
9/5/2012	10:54:58 AM	H2 MFC set to  0.000000
9/5/2012	10:54:58 AM	BCl3 MFC set to  0.000000
9/5/2012	10:54:58 AM	PH3 MFC set to  0.000000
9/5/2012	10:54:58 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:54:58 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:54:58 AM	Tube furnace set to 0
9/5/2012	10:55:28 AM	H2 valve closed
9/5/2012	10:55:28 AM	BCl3 valve closed
9/5/2012	10:55:28 AM	PH3 valve closed
9/5/2012	10:55:28 AM	SiCl4 pre valve closed
9/5/2012	10:55:28 AM	SiCl4 post valve closed
9/5/2012	10:55:28 AM	Bypass valve closed
9/5/2012	10:55:28 AM	Bubbler valve closed
9/5/2012	10:55:28 AM	Helium valve opened
9/5/2012	10:55:28 AM	Main Vac valve opened
9/5/2012	10:55:28 AM	Helium MFC set to  20.000000
9/5/2012	10:55:28 AM	H2 MFC set to  0.000000
9/5/2012	10:55:29 AM	BCl3 MFC set to  0.000000
9/5/2012	10:55:29 AM	PH3 MFC set to  0.000000
9/5/2012	10:55:29 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:55:29 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:55:29 AM	Tube furnace set to 0
9/5/2012	10:55:59 AM	Helium valve closed
9/5/2012	10:55:59 AM	H2 valve closed
9/5/2012	10:55:59 AM	BCl3 valve closed
9/5/2012	10:55:59 AM	PH3 valve closed
9/5/2012	10:55:59 AM	SiCl4 pre valve closed
9/5/2012	10:55:59 AM	SiCl4 post valve closed
9/5/2012	10:55:59 AM	Bypass valve closed
9/5/2012	10:55:59 AM	Bubbler valve closed
9/5/2012	10:55:59 AM	Main Vac valve opened
9/5/2012	10:55:59 AM	Helium MFC set to  0.000000
9/5/2012	10:55:59 AM	H2 MFC set to  0.000000
9/5/2012	10:55:59 AM	BCl3 MFC set to  0.000000
9/5/2012	10:55:59 AM	PH3 MFC set to  0.000000
9/5/2012	10:55:59 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:55:59 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:55:59 AM	Tube furnace set to 0
9/5/2012	10:56:29 AM	H2 valve closed
9/5/2012	10:56:29 AM	BCl3 valve closed
9/5/2012	10:56:29 AM	PH3 valve closed
9/5/2012	10:56:29 AM	SiCl4 pre valve closed
9/5/2012	10:56:29 AM	SiCl4 post valve closed
9/5/2012	10:56:29 AM	Bypass valve closed
9/5/2012	10:56:29 AM	Bubbler valve closed
9/5/2012	10:56:29 AM	Helium valve opened
9/5/2012	10:56:29 AM	Main Vac valve opened
9/5/2012	10:56:29 AM	Helium MFC set to  20.000000
9/5/2012	10:56:29 AM	H2 MFC set to  0.000000
9/5/2012	10:56:29 AM	BCl3 MFC set to  0.000000
9/5/2012	10:56:29 AM	PH3 MFC set to  0.000000
9/5/2012	10:56:29 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:56:29 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:56:29 AM	Tube furnace set to 0
9/5/2012	10:56:59 AM	Helium valve closed
9/5/2012	10:56:59 AM	H2 valve closed
9/5/2012	10:56:59 AM	BCl3 valve closed
9/5/2012	10:56:59 AM	PH3 valve closed
9/5/2012	10:56:59 AM	SiCl4 pre valve closed
9/5/2012	10:56:59 AM	SiCl4 post valve closed
9/5/2012	10:56:59 AM	Bypass valve closed
9/5/2012	10:56:59 AM	Bubbler valve closed
9/5/2012	10:56:59 AM	Main Vac valve opened
9/5/2012	10:56:59 AM	Helium MFC set to  0.000000
9/5/2012	10:56:59 AM	H2 MFC set to  0.000000
9/5/2012	10:56:59 AM	BCl3 MFC set to  0.000000
9/5/2012	10:56:59 AM	PH3 MFC set to  0.000000
9/5/2012	10:56:59 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:56:59 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:56:59 AM	Tube furnace set to 0
9/5/2012	10:57:00 AM	Run finished at 10:57 AM
9/5/2012	10:57:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/5/2012	10:57:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/5/2012	10:57:30 AM	Recipe started at 10:57 AM
9/5/2012	10:57:30 AM	Helium valve closed
9/5/2012	10:57:30 AM	H2 valve closed
9/5/2012	10:57:30 AM	BCl3 valve closed
9/5/2012	10:57:30 AM	PH3 valve closed
9/5/2012	10:57:30 AM	SiCl4 pre valve closed
9/5/2012	10:57:30 AM	SiCl4 post valve closed
9/5/2012	10:57:30 AM	Main Vac valve closed
9/5/2012	10:57:30 AM	Bubbler valve closed
9/5/2012	10:57:30 AM	Bypass valve opened
9/5/2012	10:57:30 AM	Helium MFC set to  0.000000
9/5/2012	10:57:30 AM	H2 MFC set to  0.000000
9/5/2012	10:57:30 AM	BCl3 MFC set to  0.000000
9/5/2012	10:57:30 AM	PH3 MFC set to  0.000000
9/5/2012	10:57:30 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:57:30 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:57:31 AM	Tube furnace set to 0
9/5/2012	10:57:31 AM	Helium valve closed
9/5/2012	10:57:31 AM	H2 valve closed
9/5/2012	10:57:31 AM	BCl3 valve closed
9/5/2012	10:57:31 AM	PH3 valve closed
9/5/2012	10:57:31 AM	SiCl4 pre valve closed
9/5/2012	10:57:31 AM	SiCl4 post valve closed
9/5/2012	10:57:31 AM	Main Vac valve closed
9/5/2012	10:57:31 AM	Bubbler valve closed
9/5/2012	10:57:31 AM	Bypass valve opened
9/5/2012	10:57:31 AM	Helium MFC set to  0.000000
9/5/2012	10:57:31 AM	H2 MFC set to  0.000000
9/5/2012	10:57:31 AM	BCl3 MFC set to  0.000000
9/5/2012	10:57:31 AM	PH3 MFC set to  0.000000
9/5/2012	10:57:31 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:57:31 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:57:31 AM	Tube furnace set to 0
9/5/2012	10:57:34 AM	Helium valve closed
9/5/2012	10:57:34 AM	H2 valve closed
9/5/2012	10:57:34 AM	BCl3 valve closed
9/5/2012	10:57:34 AM	PH3 valve closed
9/5/2012	10:57:34 AM	SiCl4 pre valve closed
9/5/2012	10:57:34 AM	SiCl4 post valve closed
9/5/2012	10:57:34 AM	Bypass valve closed
9/5/2012	10:57:34 AM	Bubbler valve closed
9/5/2012	10:57:34 AM	Main Vac valve opened
9/5/2012	10:57:34 AM	Helium MFC set to  0.000000
9/5/2012	10:57:34 AM	H2 MFC set to  0.000000
9/5/2012	10:57:34 AM	BCl3 MFC set to  0.000000
9/5/2012	10:57:34 AM	PH3 MFC set to  0.000000
9/5/2012	10:57:34 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:57:34 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:57:34 AM	Tube furnace set to 0
9/5/2012	10:57:35 AM	H2 valve closed
9/5/2012	10:57:35 AM	BCl3 valve closed
9/5/2012	10:57:35 AM	PH3 valve closed
9/5/2012	10:57:35 AM	SiCl4 pre valve closed
9/5/2012	10:57:35 AM	SiCl4 post valve closed
9/5/2012	10:57:35 AM	Bypass valve closed
9/5/2012	10:57:35 AM	Bubbler valve closed
9/5/2012	10:57:35 AM	Helium valve opened
9/5/2012	10:57:35 AM	Main Vac valve opened
9/5/2012	10:57:35 AM	Helium MFC set to  20.000000
9/5/2012	10:57:35 AM	H2 MFC set to  0.000000
9/5/2012	10:57:35 AM	BCl3 MFC set to  0.000000
9/5/2012	10:57:35 AM	PH3 MFC set to  0.000000
9/5/2012	10:57:35 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:57:35 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:57:35 AM	Tube furnace set to 0
9/5/2012	10:58:05 AM	Helium valve closed
9/5/2012	10:58:05 AM	H2 valve closed
9/5/2012	10:58:05 AM	BCl3 valve closed
9/5/2012	10:58:05 AM	PH3 valve closed
9/5/2012	10:58:05 AM	SiCl4 pre valve closed
9/5/2012	10:58:05 AM	SiCl4 post valve closed
9/5/2012	10:58:05 AM	Bypass valve closed
9/5/2012	10:58:05 AM	Bubbler valve closed
9/5/2012	10:58:05 AM	Main Vac valve opened
9/5/2012	10:58:05 AM	Helium MFC set to  0.000000
9/5/2012	10:58:05 AM	H2 MFC set to  0.000000
9/5/2012	10:58:05 AM	BCl3 MFC set to  0.000000
9/5/2012	10:58:05 AM	PH3 MFC set to  0.000000
9/5/2012	10:58:05 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:58:05 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:58:05 AM	Tube furnace set to 0
9/5/2012	10:58:35 AM	H2 valve closed
9/5/2012	10:58:35 AM	BCl3 valve closed
9/5/2012	10:58:35 AM	PH3 valve closed
9/5/2012	10:58:35 AM	SiCl4 pre valve closed
9/5/2012	10:58:35 AM	SiCl4 post valve closed
9/5/2012	10:58:35 AM	Bypass valve closed
9/5/2012	10:58:35 AM	Bubbler valve closed
9/5/2012	10:58:35 AM	Helium valve opened
9/5/2012	10:58:35 AM	Main Vac valve opened
9/5/2012	10:58:35 AM	Helium MFC set to  20.000000
9/5/2012	10:58:35 AM	H2 MFC set to  0.000000
9/5/2012	10:58:35 AM	BCl3 MFC set to  0.000000
9/5/2012	10:58:35 AM	PH3 MFC set to  0.000000
9/5/2012	10:58:35 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:58:35 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:58:35 AM	Tube furnace set to 0
9/5/2012	10:59:05 AM	Helium valve closed
9/5/2012	10:59:05 AM	H2 valve closed
9/5/2012	10:59:05 AM	BCl3 valve closed
9/5/2012	10:59:05 AM	PH3 valve closed
9/5/2012	10:59:05 AM	SiCl4 pre valve closed
9/5/2012	10:59:05 AM	SiCl4 post valve closed
9/5/2012	10:59:05 AM	Bypass valve closed
9/5/2012	10:59:05 AM	Bubbler valve closed
9/5/2012	10:59:05 AM	Main Vac valve opened
9/5/2012	10:59:05 AM	Helium MFC set to  0.000000
9/5/2012	10:59:05 AM	H2 MFC set to  0.000000
9/5/2012	10:59:05 AM	BCl3 MFC set to  0.000000
9/5/2012	10:59:05 AM	PH3 MFC set to  0.000000
9/5/2012	10:59:05 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:59:05 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:59:06 AM	Tube furnace set to 0
9/5/2012	10:59:36 AM	H2 valve closed
9/5/2012	10:59:36 AM	BCl3 valve closed
9/5/2012	10:59:36 AM	PH3 valve closed
9/5/2012	10:59:36 AM	SiCl4 pre valve closed
9/5/2012	10:59:36 AM	SiCl4 post valve closed
9/5/2012	10:59:36 AM	Bypass valve closed
9/5/2012	10:59:36 AM	Bubbler valve closed
9/5/2012	10:59:36 AM	Helium valve opened
9/5/2012	10:59:36 AM	Main Vac valve opened
9/5/2012	10:59:36 AM	Helium MFC set to  20.000000
9/5/2012	10:59:36 AM	H2 MFC set to  0.000000
9/5/2012	10:59:36 AM	BCl3 MFC set to  0.000000
9/5/2012	10:59:36 AM	PH3 MFC set to  0.000000
9/5/2012	10:59:36 AM	SiCl4 MFC set to  0.000000
9/5/2012	10:59:36 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	10:59:36 AM	Tube furnace set to 0
9/5/2012	11:00:06 AM	Helium valve closed
9/5/2012	11:00:06 AM	H2 valve closed
9/5/2012	11:00:06 AM	BCl3 valve closed
9/5/2012	11:00:06 AM	PH3 valve closed
9/5/2012	11:00:06 AM	SiCl4 pre valve closed
9/5/2012	11:00:06 AM	SiCl4 post valve closed
9/5/2012	11:00:06 AM	Bypass valve closed
9/5/2012	11:00:06 AM	Bubbler valve closed
9/5/2012	11:00:06 AM	Main Vac valve opened
9/5/2012	11:00:06 AM	Helium MFC set to  0.000000
9/5/2012	11:00:06 AM	H2 MFC set to  0.000000
9/5/2012	11:00:06 AM	BCl3 MFC set to  0.000000
9/5/2012	11:00:06 AM	PH3 MFC set to  0.000000
9/5/2012	11:00:06 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:00:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:00:06 AM	Tube furnace set to 0
9/5/2012	11:00:36 AM	H2 valve closed
9/5/2012	11:00:36 AM	BCl3 valve closed
9/5/2012	11:00:36 AM	PH3 valve closed
9/5/2012	11:00:36 AM	SiCl4 pre valve closed
9/5/2012	11:00:36 AM	SiCl4 post valve closed
9/5/2012	11:00:36 AM	Bypass valve closed
9/5/2012	11:00:36 AM	Bubbler valve closed
9/5/2012	11:00:36 AM	Helium valve opened
9/5/2012	11:00:36 AM	Main Vac valve opened
9/5/2012	11:00:36 AM	Helium MFC set to  20.000000
9/5/2012	11:00:36 AM	H2 MFC set to  0.000000
9/5/2012	11:00:36 AM	BCl3 MFC set to  0.000000
9/5/2012	11:00:36 AM	PH3 MFC set to  0.000000
9/5/2012	11:00:36 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:00:36 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:00:36 AM	Tube furnace set to 0
9/5/2012	11:01:06 AM	Helium valve closed
9/5/2012	11:01:06 AM	H2 valve closed
9/5/2012	11:01:06 AM	BCl3 valve closed
9/5/2012	11:01:06 AM	PH3 valve closed
9/5/2012	11:01:06 AM	SiCl4 pre valve closed
9/5/2012	11:01:06 AM	SiCl4 post valve closed
9/5/2012	11:01:06 AM	Bypass valve closed
9/5/2012	11:01:06 AM	Bubbler valve closed
9/5/2012	11:01:06 AM	Main Vac valve opened
9/5/2012	11:01:06 AM	Helium MFC set to  0.000000
9/5/2012	11:01:06 AM	H2 MFC set to  0.000000
9/5/2012	11:01:06 AM	BCl3 MFC set to  0.000000
9/5/2012	11:01:06 AM	PH3 MFC set to  0.000000
9/5/2012	11:01:06 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:01:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:01:06 AM	Tube furnace set to 0
9/5/2012	11:01:37 AM	H2 valve closed
9/5/2012	11:01:37 AM	BCl3 valve closed
9/5/2012	11:01:37 AM	PH3 valve closed
9/5/2012	11:01:37 AM	SiCl4 pre valve closed
9/5/2012	11:01:37 AM	SiCl4 post valve closed
9/5/2012	11:01:37 AM	Bypass valve closed
9/5/2012	11:01:37 AM	Bubbler valve closed
9/5/2012	11:01:37 AM	Helium valve opened
9/5/2012	11:01:37 AM	Main Vac valve opened
9/5/2012	11:01:37 AM	Helium MFC set to  20.000000
9/5/2012	11:01:37 AM	H2 MFC set to  0.000000
9/5/2012	11:01:37 AM	BCl3 MFC set to  0.000000
9/5/2012	11:01:37 AM	PH3 MFC set to  0.000000
9/5/2012	11:01:37 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:01:37 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:01:37 AM	Tube furnace set to 0
9/5/2012	11:02:07 AM	Helium valve closed
9/5/2012	11:02:07 AM	H2 valve closed
9/5/2012	11:02:07 AM	BCl3 valve closed
9/5/2012	11:02:07 AM	PH3 valve closed
9/5/2012	11:02:07 AM	SiCl4 pre valve closed
9/5/2012	11:02:07 AM	SiCl4 post valve closed
9/5/2012	11:02:07 AM	Bypass valve closed
9/5/2012	11:02:07 AM	Bubbler valve closed
9/5/2012	11:02:07 AM	Main Vac valve opened
9/5/2012	11:02:07 AM	Helium MFC set to  0.000000
9/5/2012	11:02:07 AM	H2 MFC set to  0.000000
9/5/2012	11:02:07 AM	BCl3 MFC set to  0.000000
9/5/2012	11:02:07 AM	PH3 MFC set to  0.000000
9/5/2012	11:02:07 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:02:07 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:02:07 AM	Tube furnace set to 0
9/5/2012	11:02:37 AM	H2 valve closed
9/5/2012	11:02:37 AM	BCl3 valve closed
9/5/2012	11:02:37 AM	PH3 valve closed
9/5/2012	11:02:37 AM	SiCl4 pre valve closed
9/5/2012	11:02:37 AM	SiCl4 post valve closed
9/5/2012	11:02:37 AM	Bypass valve closed
9/5/2012	11:02:37 AM	Bubbler valve closed
9/5/2012	11:02:37 AM	Helium valve opened
9/5/2012	11:02:37 AM	Main Vac valve opened
9/5/2012	11:02:37 AM	Helium MFC set to  20.000000
9/5/2012	11:02:37 AM	H2 MFC set to  0.000000
9/5/2012	11:02:37 AM	BCl3 MFC set to  0.000000
9/5/2012	11:02:37 AM	PH3 MFC set to  0.000000
9/5/2012	11:02:37 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:02:37 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:02:37 AM	Tube furnace set to 0
9/5/2012	11:03:07 AM	Helium valve closed
9/5/2012	11:03:07 AM	H2 valve closed
9/5/2012	11:03:07 AM	BCl3 valve closed
9/5/2012	11:03:07 AM	PH3 valve closed
9/5/2012	11:03:07 AM	SiCl4 pre valve closed
9/5/2012	11:03:07 AM	SiCl4 post valve closed
9/5/2012	11:03:07 AM	Bypass valve closed
9/5/2012	11:03:07 AM	Bubbler valve closed
9/5/2012	11:03:07 AM	Main Vac valve opened
9/5/2012	11:03:07 AM	Helium MFC set to  0.000000
9/5/2012	11:03:07 AM	H2 MFC set to  0.000000
9/5/2012	11:03:07 AM	BCl3 MFC set to  0.000000
9/5/2012	11:03:07 AM	PH3 MFC set to  0.000000
9/5/2012	11:03:07 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:03:07 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:03:07 AM	Tube furnace set to 0
9/5/2012	11:03:37 AM	H2 valve closed
9/5/2012	11:03:37 AM	BCl3 valve closed
9/5/2012	11:03:37 AM	PH3 valve closed
9/5/2012	11:03:37 AM	SiCl4 pre valve closed
9/5/2012	11:03:37 AM	SiCl4 post valve closed
9/5/2012	11:03:37 AM	Bypass valve closed
9/5/2012	11:03:37 AM	Bubbler valve closed
9/5/2012	11:03:37 AM	Helium valve opened
9/5/2012	11:03:38 AM	Main Vac valve opened
9/5/2012	11:03:38 AM	Helium MFC set to  20.000000
9/5/2012	11:03:38 AM	H2 MFC set to  0.000000
9/5/2012	11:03:38 AM	BCl3 MFC set to  0.000000
9/5/2012	11:03:38 AM	PH3 MFC set to  0.000000
9/5/2012	11:03:38 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:03:38 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:03:38 AM	Tube furnace set to 0
9/5/2012	11:04:08 AM	Helium valve closed
9/5/2012	11:04:08 AM	H2 valve closed
9/5/2012	11:04:08 AM	BCl3 valve closed
9/5/2012	11:04:08 AM	PH3 valve closed
9/5/2012	11:04:08 AM	SiCl4 pre valve closed
9/5/2012	11:04:08 AM	SiCl4 post valve closed
9/5/2012	11:04:08 AM	Bypass valve closed
9/5/2012	11:04:08 AM	Bubbler valve closed
9/5/2012	11:04:08 AM	Main Vac valve opened
9/5/2012	11:04:08 AM	Helium MFC set to  0.000000
9/5/2012	11:04:08 AM	H2 MFC set to  0.000000
9/5/2012	11:04:08 AM	BCl3 MFC set to  0.000000
9/5/2012	11:04:08 AM	PH3 MFC set to  0.000000
9/5/2012	11:04:08 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:04:08 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:04:08 AM	Tube furnace set to 0
9/5/2012	11:04:38 AM	H2 valve closed
9/5/2012	11:04:38 AM	BCl3 valve closed
9/5/2012	11:04:38 AM	PH3 valve closed
9/5/2012	11:04:38 AM	SiCl4 pre valve closed
9/5/2012	11:04:38 AM	SiCl4 post valve closed
9/5/2012	11:04:38 AM	Bypass valve closed
9/5/2012	11:04:38 AM	Bubbler valve closed
9/5/2012	11:04:38 AM	Helium valve opened
9/5/2012	11:04:38 AM	Main Vac valve opened
9/5/2012	11:04:38 AM	Helium MFC set to  20.000000
9/5/2012	11:04:38 AM	H2 MFC set to  0.000000
9/5/2012	11:04:38 AM	BCl3 MFC set to  0.000000
9/5/2012	11:04:38 AM	PH3 MFC set to  0.000000
9/5/2012	11:04:38 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:04:38 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:04:38 AM	Tube furnace set to 0
9/5/2012	11:05:08 AM	Helium valve closed
9/5/2012	11:05:08 AM	H2 valve closed
9/5/2012	11:05:08 AM	BCl3 valve closed
9/5/2012	11:05:08 AM	PH3 valve closed
9/5/2012	11:05:08 AM	SiCl4 pre valve closed
9/5/2012	11:05:08 AM	SiCl4 post valve closed
9/5/2012	11:05:08 AM	Bypass valve closed
9/5/2012	11:05:08 AM	Bubbler valve closed
9/5/2012	11:05:08 AM	Main Vac valve opened
9/5/2012	11:05:08 AM	Helium MFC set to  0.000000
9/5/2012	11:05:08 AM	H2 MFC set to  0.000000
9/5/2012	11:05:08 AM	BCl3 MFC set to  0.000000
9/5/2012	11:05:08 AM	PH3 MFC set to  0.000000
9/5/2012	11:05:08 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:05:08 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:05:08 AM	Tube furnace set to 0
9/5/2012	11:05:38 AM	H2 valve closed
9/5/2012	11:05:38 AM	BCl3 valve closed
9/5/2012	11:05:38 AM	PH3 valve closed
9/5/2012	11:05:38 AM	SiCl4 pre valve closed
9/5/2012	11:05:38 AM	SiCl4 post valve closed
9/5/2012	11:05:38 AM	Bypass valve closed
9/5/2012	11:05:38 AM	Bubbler valve closed
9/5/2012	11:05:38 AM	Helium valve opened
9/5/2012	11:05:38 AM	Main Vac valve opened
9/5/2012	11:05:38 AM	Helium MFC set to  20.000000
9/5/2012	11:05:38 AM	H2 MFC set to  0.000000
9/5/2012	11:05:38 AM	BCl3 MFC set to  0.000000
9/5/2012	11:05:38 AM	PH3 MFC set to  0.000000
9/5/2012	11:05:38 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:05:38 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:05:39 AM	Tube furnace set to 0
9/5/2012	11:06:09 AM	Helium valve closed
9/5/2012	11:06:09 AM	H2 valve closed
9/5/2012	11:06:09 AM	BCl3 valve closed
9/5/2012	11:06:09 AM	PH3 valve closed
9/5/2012	11:06:09 AM	SiCl4 pre valve closed
9/5/2012	11:06:09 AM	SiCl4 post valve closed
9/5/2012	11:06:09 AM	Bypass valve closed
9/5/2012	11:06:09 AM	Bubbler valve closed
9/5/2012	11:06:09 AM	Main Vac valve opened
9/5/2012	11:06:09 AM	Helium MFC set to  0.000000
9/5/2012	11:06:09 AM	H2 MFC set to  0.000000
9/5/2012	11:06:09 AM	BCl3 MFC set to  0.000000
9/5/2012	11:06:09 AM	PH3 MFC set to  0.000000
9/5/2012	11:06:09 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:06:09 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:06:09 AM	Tube furnace set to 0
9/5/2012	11:06:39 AM	H2 valve closed
9/5/2012	11:06:39 AM	BCl3 valve closed
9/5/2012	11:06:39 AM	PH3 valve closed
9/5/2012	11:06:39 AM	SiCl4 pre valve closed
9/5/2012	11:06:39 AM	SiCl4 post valve closed
9/5/2012	11:06:39 AM	Bypass valve closed
9/5/2012	11:06:39 AM	Bubbler valve closed
9/5/2012	11:06:39 AM	Helium valve opened
9/5/2012	11:06:39 AM	Main Vac valve opened
9/5/2012	11:06:39 AM	Helium MFC set to  20.000000
9/5/2012	11:06:39 AM	H2 MFC set to  0.000000
9/5/2012	11:06:39 AM	BCl3 MFC set to  0.000000
9/5/2012	11:06:39 AM	PH3 MFC set to  0.000000
9/5/2012	11:06:39 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:06:39 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:06:39 AM	Tube furnace set to 0
9/5/2012	11:07:09 AM	Helium valve closed
9/5/2012	11:07:09 AM	H2 valve closed
9/5/2012	11:07:09 AM	BCl3 valve closed
9/5/2012	11:07:09 AM	PH3 valve closed
9/5/2012	11:07:09 AM	SiCl4 pre valve closed
9/5/2012	11:07:09 AM	SiCl4 post valve closed
9/5/2012	11:07:09 AM	Bypass valve closed
9/5/2012	11:07:09 AM	Bubbler valve closed
9/5/2012	11:07:09 AM	Main Vac valve opened
9/5/2012	11:07:09 AM	Helium MFC set to  0.000000
9/5/2012	11:07:09 AM	H2 MFC set to  0.000000
9/5/2012	11:07:09 AM	BCl3 MFC set to  0.000000
9/5/2012	11:07:09 AM	PH3 MFC set to  0.000000
9/5/2012	11:07:09 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:07:09 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:07:09 AM	Tube furnace set to 0
9/5/2012	11:07:10 AM	Run finished at 11:07 AM
9/5/2012	11:07:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/5/2012	11:12:10 AM	Recipe started at 11:12 AM
9/5/2012	11:12:10 AM	Helium valve closed
9/5/2012	11:12:10 AM	H2 valve closed
9/5/2012	11:12:10 AM	BCl3 valve closed
9/5/2012	11:12:10 AM	PH3 valve closed
9/5/2012	11:12:10 AM	SiCl4 pre valve closed
9/5/2012	11:12:10 AM	SiCl4 post valve closed
9/5/2012	11:12:10 AM	Main Vac valve closed
9/5/2012	11:12:10 AM	Bypass valve closed
9/5/2012	11:12:10 AM	Bubbler valve closed
9/5/2012	11:12:10 AM	Helium MFC set to  0.000000
9/5/2012	11:12:10 AM	H2 MFC set to  0.000000
9/5/2012	11:12:10 AM	BCl3 MFC set to  0.000000
9/5/2012	11:12:10 AM	PH3 MFC set to  0.000000
9/5/2012	11:12:10 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:12:10 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:12:10 AM	Tube furnace set to 0
9/5/2012	11:12:13 AM	Helium valve closed
9/5/2012	11:12:13 AM	BCl3 valve closed
9/5/2012	11:12:13 AM	PH3 valve closed
9/5/2012	11:12:13 AM	SiCl4 pre valve closed
9/5/2012	11:12:13 AM	SiCl4 post valve closed
9/5/2012	11:12:13 AM	Main Vac valve closed
9/5/2012	11:12:13 AM	Bypass valve closed
9/5/2012	11:12:13 AM	Bubbler valve closed
9/5/2012	11:12:13 AM	H2 valve opened
9/5/2012	11:12:13 AM	Helium MFC set to  0.000000
9/5/2012	11:12:13 AM	H2 MFC set to  500.000000
9/5/2012	11:12:13 AM	BCl3 MFC set to  0.000000
9/5/2012	11:12:13 AM	PH3 MFC set to  0.000000
9/5/2012	11:12:13 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:12:13 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:12:13 AM	Tube furnace set to 0
9/5/2012	11:13:30 AM	Helium valve closed
9/5/2012	11:13:30 AM	BCl3 valve closed
9/5/2012	11:13:30 AM	PH3 valve closed
9/5/2012	11:13:30 AM	SiCl4 pre valve closed
9/5/2012	11:13:30 AM	SiCl4 post valve closed
9/5/2012	11:13:30 AM	Main Vac valve closed
9/5/2012	11:13:30 AM	Bypass valve closed
9/5/2012	11:13:30 AM	H2 valve opened
9/5/2012	11:13:30 AM	Bubbler valve opened
9/5/2012	11:13:30 AM	Helium MFC set to  0.000000
9/5/2012	11:13:30 AM	H2 MFC set to  500.000000
9/5/2012	11:13:30 AM	BCl3 MFC set to  0.000000
9/5/2012	11:13:30 AM	PH3 MFC set to  0.000000
9/5/2012	11:13:30 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:13:30 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:13:30 AM	Tube furnace set to 0
9/5/2012	11:13:31 AM	Helium valve closed
9/5/2012	11:13:31 AM	BCl3 valve closed
9/5/2012	11:13:31 AM	PH3 valve closed
9/5/2012	11:13:31 AM	SiCl4 pre valve closed
9/5/2012	11:13:31 AM	SiCl4 post valve closed
9/5/2012	11:13:31 AM	Main Vac valve closed
9/5/2012	11:13:31 AM	Bypass valve closed
9/5/2012	11:13:31 AM	H2 valve opened
9/5/2012	11:13:31 AM	Bubbler valve opened
9/5/2012	11:13:31 AM	Helium MFC set to  0.000000
9/5/2012	11:13:31 AM	H2 MFC set to  500.000000
9/5/2012	11:13:31 AM	BCl3 MFC set to  0.000000
9/5/2012	11:13:31 AM	PH3 MFC set to  0.000000
9/5/2012	11:13:31 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:13:31 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:13:31 AM	Tube furnace set to 1000
9/5/2012	11:33:31 AM	Helium valve closed
9/5/2012	11:33:31 AM	PH3 valve closed
9/5/2012	11:33:31 AM	Main Vac valve closed
9/5/2012	11:33:31 AM	Bypass valve closed
9/5/2012	11:33:31 AM	H2 valve opened
9/5/2012	11:33:31 AM	BCl3 valve opened
9/5/2012	11:33:31 AM	SiCl4 pre valve opened
9/5/2012	11:33:31 AM	SiCl4 post valve opened
9/5/2012	11:33:31 AM	Bubbler valve opened
9/5/2012	11:33:31 AM	Helium MFC set to  0.000000
9/5/2012	11:33:31 AM	H2 MFC set to  450.000000
9/5/2012	11:33:31 AM	BCl3 MFC set to  1.300000
9/5/2012	11:33:31 AM	PH3 MFC set to  0.000000
9/5/2012	11:33:31 AM	SiCl4 MFC set to  50.000000
9/5/2012	11:33:31 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:33:31 AM	Tube furnace set to 1000
9/5/2012	11:53:31 AM	Helium valve closed
9/5/2012	11:53:31 AM	BCl3 valve closed
9/5/2012	11:53:31 AM	PH3 valve closed
9/5/2012	11:53:31 AM	SiCl4 pre valve closed
9/5/2012	11:53:31 AM	SiCl4 post valve closed
9/5/2012	11:53:31 AM	Main Vac valve closed
9/5/2012	11:53:31 AM	Bypass valve closed
9/5/2012	11:53:31 AM	H2 valve opened
9/5/2012	11:53:31 AM	Bubbler valve opened
9/5/2012	11:53:31 AM	Helium MFC set to  0.000000
9/5/2012	11:53:31 AM	H2 MFC set to  500.000000
9/5/2012	11:53:31 AM	BCl3 MFC set to  0.000000
9/5/2012	11:53:31 AM	PH3 MFC set to  0.000000
9/5/2012	11:53:31 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:53:31 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:53:32 AM	Tube furnace set to 750
9/5/2012	11:58:32 AM	H2 valve closed
9/5/2012	11:58:32 AM	BCl3 valve closed
9/5/2012	11:58:32 AM	PH3 valve closed
9/5/2012	11:58:32 AM	SiCl4 pre valve closed
9/5/2012	11:58:32 AM	SiCl4 post valve closed
9/5/2012	11:58:32 AM	Main Vac valve closed
9/5/2012	11:58:32 AM	Bypass valve closed
9/5/2012	11:58:32 AM	Helium valve opened
9/5/2012	11:58:32 AM	Bubbler valve opened
9/5/2012	11:58:32 AM	Helium MFC set to  500.000000
9/5/2012	11:58:32 AM	H2 MFC set to  0.000000
9/5/2012	11:58:32 AM	BCl3 MFC set to  0.000000
9/5/2012	11:58:32 AM	PH3 MFC set to  0.000000
9/5/2012	11:58:32 AM	SiCl4 MFC set to  0.000000
9/5/2012	11:58:32 AM	Bypass solenoid MFC set to  0.000000
9/5/2012	11:58:32 AM	Tube furnace set to 0
9/5/2012	12:14:10 PM	Run aborted at 12:14 PM
9/5/2012	12:14:10 PM	Helium valve closed
9/5/2012	12:14:10 PM	H2 valve closed
9/5/2012	12:14:10 PM	BCl3 valve closed
9/5/2012	12:14:10 PM	PH3 valve closed
9/5/2012	12:14:10 PM	SiCl4 pre valve closed
9/5/2012	12:14:10 PM	SiCl4 post valve closed
9/5/2012	12:14:10 PM	Bypass valve closed
9/5/2012	12:14:10 PM	Main Vac valve closed
9/5/2012	12:14:10 PM	Bubbler valve closed
9/5/2012	12:14:10 PM	Helium MFC set to  0.000000
9/5/2012	12:14:10 PM	H2 MFC set to  0.000000
9/5/2012	12:14:10 PM	BCl3 MFC set to  0.000000
9/5/2012	12:14:10 PM	PH3 MFC set to  0.000000
9/5/2012	12:14:10 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:14:10 PM	Tube furnace set to 0
9/5/2012	12:14:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	12:14:12 PM	Recipe started at 12:14 PM
9/5/2012	12:14:12 PM	Helium valve closed
9/5/2012	12:14:12 PM	H2 valve closed
9/5/2012	12:14:12 PM	BCl3 valve closed
9/5/2012	12:14:12 PM	PH3 valve closed
9/5/2012	12:14:12 PM	SiCl4 pre valve closed
9/5/2012	12:14:12 PM	SiCl4 post valve closed
9/5/2012	12:14:12 PM	Main Vac valve closed
9/5/2012	12:14:12 PM	Bypass valve closed
9/5/2012	12:14:12 PM	Bubbler valve closed
9/5/2012	12:14:12 PM	Helium MFC set to  0.000000
9/5/2012	12:14:12 PM	H2 MFC set to  0.000000
9/5/2012	12:14:12 PM	BCl3 MFC set to  0.000000
9/5/2012	12:14:12 PM	PH3 MFC set to  0.000000
9/5/2012	12:14:12 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:14:12 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:14:12 PM	Tube furnace set to 0
9/5/2012	12:14:15 PM	H2 valve closed
9/5/2012	12:14:15 PM	BCl3 valve closed
9/5/2012	12:14:15 PM	PH3 valve closed
9/5/2012	12:14:15 PM	SiCl4 pre valve closed
9/5/2012	12:14:15 PM	SiCl4 post valve closed
9/5/2012	12:14:15 PM	Main Vac valve closed
9/5/2012	12:14:15 PM	Bypass valve closed
9/5/2012	12:14:15 PM	Bubbler valve closed
9/5/2012	12:14:15 PM	Helium valve opened
9/5/2012	12:14:15 PM	Helium MFC set to  500.000000
9/5/2012	12:14:15 PM	H2 MFC set to  0.000000
9/5/2012	12:14:15 PM	BCl3 MFC set to  0.000000
9/5/2012	12:14:15 PM	PH3 MFC set to  0.000000
9/5/2012	12:14:15 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:14:15 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:14:15 PM	Tube furnace set to 0
9/5/2012	12:14:16 PM	Helium valve closed
9/5/2012	12:14:16 PM	H2 valve closed
9/5/2012	12:14:16 PM	BCl3 valve closed
9/5/2012	12:14:16 PM	PH3 valve closed
9/5/2012	12:14:16 PM	SiCl4 pre valve closed
9/5/2012	12:14:16 PM	SiCl4 post valve closed
9/5/2012	12:14:16 PM	Main Vac valve closed
9/5/2012	12:14:16 PM	Bypass valve closed
9/5/2012	12:14:16 PM	Bubbler valve closed
9/5/2012	12:14:16 PM	Helium MFC set to  0.000000
9/5/2012	12:14:16 PM	H2 MFC set to  0.000000
9/5/2012	12:14:16 PM	BCl3 MFC set to  0.000000
9/5/2012	12:14:16 PM	PH3 MFC set to  0.000000
9/5/2012	12:14:16 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:14:16 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:14:16 PM	Tube furnace set to 0
9/5/2012	12:14:17 PM	Run finished at 12:14 PM
9/5/2012	12:14:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	12:16:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	12:16:02 PM	Recipe started at 12:16 PM
9/5/2012	12:16:02 PM	Helium valve closed
9/5/2012	12:16:02 PM	H2 valve closed
9/5/2012	12:16:02 PM	BCl3 valve closed
9/5/2012	12:16:02 PM	PH3 valve closed
9/5/2012	12:16:02 PM	SiCl4 pre valve closed
9/5/2012	12:16:02 PM	SiCl4 post valve closed
9/5/2012	12:16:02 PM	Main Vac valve closed
9/5/2012	12:16:02 PM	Bubbler valve closed
9/5/2012	12:16:02 PM	Bypass valve opened
9/5/2012	12:16:02 PM	Helium MFC set to  0.000000
9/5/2012	12:16:02 PM	H2 MFC set to  0.000000
9/5/2012	12:16:02 PM	BCl3 MFC set to  0.000000
9/5/2012	12:16:02 PM	PH3 MFC set to  0.000000
9/5/2012	12:16:02 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:16:02 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:16:02 PM	Tube furnace set to 0
9/5/2012	12:17:09 PM	Helium valve closed
9/5/2012	12:17:09 PM	H2 valve closed
9/5/2012	12:17:09 PM	BCl3 valve closed
9/5/2012	12:17:09 PM	PH3 valve closed
9/5/2012	12:17:09 PM	SiCl4 pre valve closed
9/5/2012	12:17:09 PM	SiCl4 post valve closed
9/5/2012	12:17:09 PM	Main Vac valve closed
9/5/2012	12:17:09 PM	Bubbler valve closed
9/5/2012	12:17:09 PM	Bypass valve opened
9/5/2012	12:17:09 PM	Helium MFC set to  0.000000
9/5/2012	12:17:09 PM	H2 MFC set to  0.000000
9/5/2012	12:17:09 PM	BCl3 MFC set to  0.000000
9/5/2012	12:17:09 PM	PH3 MFC set to  0.000000
9/5/2012	12:17:09 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:17:09 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:17:09 PM	Tube furnace set to 0
9/5/2012	12:18:09 PM	Helium valve closed
9/5/2012	12:18:09 PM	H2 valve closed
9/5/2012	12:18:09 PM	BCl3 valve closed
9/5/2012	12:18:09 PM	PH3 valve closed
9/5/2012	12:18:09 PM	SiCl4 pre valve closed
9/5/2012	12:18:09 PM	SiCl4 post valve closed
9/5/2012	12:18:09 PM	Bypass valve closed
9/5/2012	12:18:09 PM	Bubbler valve closed
9/5/2012	12:18:09 PM	Main Vac valve opened
9/5/2012	12:18:09 PM	Helium MFC set to  0.000000
9/5/2012	12:18:10 PM	H2 MFC set to  0.000000
9/5/2012	12:18:10 PM	BCl3 MFC set to  0.000000
9/5/2012	12:18:10 PM	PH3 MFC set to  0.000000
9/5/2012	12:18:10 PM	SiCl4 MFC set to  0.000000
9/5/2012	12:18:10 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	12:18:10 PM	Tube furnace set to 0
9/5/2012	12:18:11 PM	Run finished at 12:18 PM
9/5/2012	12:18:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	5:55:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	5:55:39 PM	Recipe started at 5:55 PM
9/5/2012	5:55:39 PM	Helium valve closed
9/5/2012	5:55:39 PM	H2 valve closed
9/5/2012	5:55:39 PM	BCl3 valve closed
9/5/2012	5:55:39 PM	PH3 valve closed
9/5/2012	5:55:39 PM	SiCl4 pre valve closed
9/5/2012	5:55:39 PM	SiCl4 post valve closed
9/5/2012	5:55:39 PM	Main Vac valve closed
9/5/2012	5:55:39 PM	Bypass valve closed
9/5/2012	5:55:39 PM	Bubbler valve closed
9/5/2012	5:55:39 PM	Helium MFC set to  0.000000
9/5/2012	5:55:39 PM	H2 MFC set to  0.000000
9/5/2012	5:55:39 PM	BCl3 MFC set to  0.000000
9/5/2012	5:55:39 PM	PH3 MFC set to  0.000000
9/5/2012	5:55:39 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:55:39 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:55:39 PM	Tube furnace set to 0
9/5/2012	5:55:42 PM	H2 valve closed
9/5/2012	5:55:42 PM	BCl3 valve closed
9/5/2012	5:55:42 PM	PH3 valve closed
9/5/2012	5:55:42 PM	SiCl4 pre valve closed
9/5/2012	5:55:42 PM	SiCl4 post valve closed
9/5/2012	5:55:42 PM	Main Vac valve closed
9/5/2012	5:55:42 PM	Bypass valve closed
9/5/2012	5:55:42 PM	Bubbler valve closed
9/5/2012	5:55:42 PM	Helium valve opened
9/5/2012	5:55:42 PM	Helium MFC set to  500.000000
9/5/2012	5:55:42 PM	H2 MFC set to  0.000000
9/5/2012	5:55:42 PM	BCl3 MFC set to  0.000000
9/5/2012	5:55:42 PM	PH3 MFC set to  0.000000
9/5/2012	5:55:42 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:55:42 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:55:43 PM	Tube furnace set to 0
9/5/2012	5:56:56 PM	Helium valve closed
9/5/2012	5:56:56 PM	H2 valve closed
9/5/2012	5:56:56 PM	BCl3 valve closed
9/5/2012	5:56:56 PM	PH3 valve closed
9/5/2012	5:56:56 PM	SiCl4 pre valve closed
9/5/2012	5:56:56 PM	SiCl4 post valve closed
9/5/2012	5:56:56 PM	Main Vac valve closed
9/5/2012	5:56:56 PM	Bypass valve closed
9/5/2012	5:56:56 PM	Bubbler valve closed
9/5/2012	5:56:56 PM	Helium MFC set to  0.000000
9/5/2012	5:56:56 PM	H2 MFC set to  0.000000
9/5/2012	5:56:56 PM	BCl3 MFC set to  0.000000
9/5/2012	5:56:56 PM	PH3 MFC set to  0.000000
9/5/2012	5:56:56 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:56:56 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:56:56 PM	Tube furnace set to 0
9/5/2012	5:56:57 PM	Run finished at 5:56 PM
9/5/2012	5:56:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	5:58:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	5:58:22 PM	Recipe started at 5:58 PM
9/5/2012	5:58:22 PM	Helium valve closed
9/5/2012	5:58:22 PM	H2 valve closed
9/5/2012	5:58:22 PM	BCl3 valve closed
9/5/2012	5:58:22 PM	PH3 valve closed
9/5/2012	5:58:22 PM	SiCl4 pre valve closed
9/5/2012	5:58:22 PM	SiCl4 post valve closed
9/5/2012	5:58:22 PM	Main Vac valve closed
9/5/2012	5:58:22 PM	Bubbler valve closed
9/5/2012	5:58:22 PM	Bypass valve opened
9/5/2012	5:58:22 PM	Helium MFC set to  0.000000
9/5/2012	5:58:22 PM	H2 MFC set to  0.000000
9/5/2012	5:58:22 PM	BCl3 MFC set to  0.000000
9/5/2012	5:58:22 PM	PH3 MFC set to  0.000000
9/5/2012	5:58:22 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:58:22 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:58:22 PM	Tube furnace set to 0
9/5/2012	5:58:38 PM	Run aborted at 5:58 PM
9/5/2012	5:58:38 PM	Helium valve closed
9/5/2012	5:58:38 PM	H2 valve closed
9/5/2012	5:58:38 PM	BCl3 valve closed
9/5/2012	5:58:38 PM	PH3 valve closed
9/5/2012	5:58:38 PM	SiCl4 pre valve closed
9/5/2012	5:58:38 PM	SiCl4 post valve closed
9/5/2012	5:58:38 PM	Bypass valve closed
9/5/2012	5:58:38 PM	Main Vac valve closed
9/5/2012	5:58:38 PM	Bubbler valve closed
9/5/2012	5:58:38 PM	Helium MFC set to  0.000000
9/5/2012	5:58:38 PM	H2 MFC set to  0.000000
9/5/2012	5:58:38 PM	BCl3 MFC set to  0.000000
9/5/2012	5:58:39 PM	PH3 MFC set to  0.000000
9/5/2012	5:58:39 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:58:39 PM	Tube furnace set to 0
9/5/2012	5:58:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	5:58:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	5:58:41 PM	Recipe started at 5:58 PM
9/5/2012	5:58:41 PM	Helium valve closed
9/5/2012	5:58:41 PM	H2 valve closed
9/5/2012	5:58:41 PM	BCl3 valve closed
9/5/2012	5:58:41 PM	PH3 valve closed
9/5/2012	5:58:41 PM	SiCl4 pre valve closed
9/5/2012	5:58:41 PM	SiCl4 post valve closed
9/5/2012	5:58:41 PM	Main Vac valve closed
9/5/2012	5:58:41 PM	Bypass valve closed
9/5/2012	5:58:41 PM	Bubbler valve closed
9/5/2012	5:58:41 PM	Helium MFC set to  0.000000
9/5/2012	5:58:41 PM	H2 MFC set to  0.000000
9/5/2012	5:58:41 PM	BCl3 MFC set to  0.000000
9/5/2012	5:58:41 PM	PH3 MFC set to  0.000000
9/5/2012	5:58:41 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:58:41 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:58:41 PM	Tube furnace set to 0
9/5/2012	5:58:44 PM	H2 valve closed
9/5/2012	5:58:44 PM	BCl3 valve closed
9/5/2012	5:58:44 PM	PH3 valve closed
9/5/2012	5:58:44 PM	SiCl4 pre valve closed
9/5/2012	5:58:44 PM	SiCl4 post valve closed
9/5/2012	5:58:44 PM	Main Vac valve closed
9/5/2012	5:58:44 PM	Bypass valve closed
9/5/2012	5:58:44 PM	Bubbler valve closed
9/5/2012	5:58:44 PM	Helium valve opened
9/5/2012	5:58:44 PM	Helium MFC set to  500.000000
9/5/2012	5:58:44 PM	H2 MFC set to  0.000000
9/5/2012	5:58:44 PM	BCl3 MFC set to  0.000000
9/5/2012	5:58:44 PM	PH3 MFC set to  0.000000
9/5/2012	5:58:44 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:58:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:58:44 PM	Tube furnace set to 0
9/5/2012	5:58:46 PM	Helium valve closed
9/5/2012	5:58:46 PM	H2 valve closed
9/5/2012	5:58:46 PM	BCl3 valve closed
9/5/2012	5:58:46 PM	PH3 valve closed
9/5/2012	5:58:46 PM	SiCl4 pre valve closed
9/5/2012	5:58:46 PM	SiCl4 post valve closed
9/5/2012	5:58:46 PM	Main Vac valve closed
9/5/2012	5:58:46 PM	Bypass valve closed
9/5/2012	5:58:46 PM	Bubbler valve closed
9/5/2012	5:58:46 PM	Helium MFC set to  0.000000
9/5/2012	5:58:46 PM	H2 MFC set to  0.000000
9/5/2012	5:58:46 PM	BCl3 MFC set to  0.000000
9/5/2012	5:58:46 PM	PH3 MFC set to  0.000000
9/5/2012	5:58:46 PM	SiCl4 MFC set to  0.000000
9/5/2012	5:58:46 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	5:58:46 PM	Tube furnace set to 0
9/5/2012	5:58:47 PM	Run finished at 5:58 PM
9/5/2012	5:58:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2012	6:00:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2012	6:00:07 PM	Recipe started at 6:00 PM
9/5/2012	6:00:07 PM	Helium valve closed
9/5/2012	6:00:07 PM	H2 valve closed
9/5/2012	6:00:07 PM	BCl3 valve closed
9/5/2012	6:00:07 PM	PH3 valve closed
9/5/2012	6:00:07 PM	SiCl4 pre valve closed
9/5/2012	6:00:07 PM	SiCl4 post valve closed
9/5/2012	6:00:07 PM	Main Vac valve closed
9/5/2012	6:00:07 PM	Bubbler valve closed
9/5/2012	6:00:07 PM	Bypass valve opened
9/5/2012	6:00:07 PM	Helium MFC set to  0.000000
9/5/2012	6:00:07 PM	H2 MFC set to  0.000000
9/5/2012	6:00:07 PM	BCl3 MFC set to  0.000000
9/5/2012	6:00:07 PM	PH3 MFC set to  0.000000
9/5/2012	6:00:07 PM	SiCl4 MFC set to  0.000000
9/5/2012	6:00:07 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	6:00:07 PM	Tube furnace set to 0
9/5/2012	6:02:30 PM	Helium valve closed
9/5/2012	6:02:30 PM	H2 valve closed
9/5/2012	6:02:30 PM	BCl3 valve closed
9/5/2012	6:02:30 PM	PH3 valve closed
9/5/2012	6:02:30 PM	SiCl4 pre valve closed
9/5/2012	6:02:30 PM	SiCl4 post valve closed
9/5/2012	6:02:30 PM	Main Vac valve closed
9/5/2012	6:02:30 PM	Bubbler valve closed
9/5/2012	6:02:30 PM	Bypass valve opened
9/5/2012	6:02:30 PM	Helium MFC set to  0.000000
9/5/2012	6:02:30 PM	H2 MFC set to  0.000000
9/5/2012	6:02:30 PM	BCl3 MFC set to  0.000000
9/5/2012	6:02:30 PM	PH3 MFC set to  0.000000
9/5/2012	6:02:30 PM	SiCl4 MFC set to  0.000000
9/5/2012	6:02:30 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	6:02:30 PM	Tube furnace set to 0
9/5/2012	6:03:30 PM	Helium valve closed
9/5/2012	6:03:30 PM	H2 valve closed
9/5/2012	6:03:30 PM	BCl3 valve closed
9/5/2012	6:03:30 PM	PH3 valve closed
9/5/2012	6:03:30 PM	SiCl4 pre valve closed
9/5/2012	6:03:30 PM	SiCl4 post valve closed
9/5/2012	6:03:30 PM	Bypass valve closed
9/5/2012	6:03:30 PM	Bubbler valve closed
9/5/2012	6:03:30 PM	Main Vac valve opened
9/5/2012	6:03:30 PM	Helium MFC set to  0.000000
9/5/2012	6:03:30 PM	H2 MFC set to  0.000000
9/5/2012	6:03:30 PM	BCl3 MFC set to  0.000000
9/5/2012	6:03:30 PM	PH3 MFC set to  0.000000
9/5/2012	6:03:30 PM	SiCl4 MFC set to  0.000000
9/5/2012	6:03:30 PM	Bypass solenoid MFC set to  0.000000
9/5/2012	6:03:31 PM	Tube furnace set to 0
9/5/2012	6:03:32 PM	Run finished at 6:03 PM
9/5/2012	6:03:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
